Terahertz and Emerging Frequencies THz Technology Informational

What substrate materials are suitable for circuits operating above 300 GHz?

At frequencies above 300 GHz, substrate material selection becomes dominated by the need for extremely thin substrates (to suppress surface wave modes), very low dielectric loss, and compatibility with sub-micrometer lithography. Indium phosphide (InP) is the dominant semiconductor substrate because InP HEMT and HBT transistors achieve the highest gain at these frequencies. For passive circuits, quartz (crystalline SiO2, Dk 4.6) and fused silica (Dk 3.8) provide ultra-low loss. High-resistivity silicon (HR-Si, Dk 11.7) is used for silicon-based technologies. At frequencies approaching and beyond 1 THz, membrane-supported circuits that suspend the metallization on a thin dielectric membrane (1-3 micrometers of SiN or SiO2) over an air gap provide the lowest loss by virtually eliminating substrate dielectric loss.
Category: Terahertz and Emerging Frequencies
Updated: April 2026
Product Tie-In: THz Components, Detectors, Sources

Selecting Substrate Materials for Sub-THz and THz Circuits

Above 300 GHz, every aspect of substrate performance becomes critical. Dielectric loss that was acceptable at 30 GHz becomes prohibitive. Surface wave excitation on thick substrates creates parasitic coupling. Dimensional tolerances that were comfortable at microwave frequencies become a significant fraction of a wavelength.

  • Performance verification: confirm specifications against the application requirements before finalizing the design
  • Environmental factors: temperature range, humidity, and vibration affect long-term reliability and parameter drift
  • Cost vs. performance: evaluate whether the application demands premium components or standard commercial grades
Common Questions

Frequently Asked Questions

Why is InP the dominant technology for circuits above 300 GHz?

InP offers the best combination of electron mobility, breakdown voltage, and established MMIC fabrication processes. InP HEMT transistors hold the record for highest fmax (above 1.5 THz), providing usable gain at frequencies where other technologies have none.

What is a membrane-supported circuit?

A membrane circuit suspends the conductor pattern on a thin (1-3 micrometer) dielectric membrane with the substrate beneath removed by etching. The effective dielectric constant approaches 1.0, virtually eliminating substrate loss.

Can standard PCB materials be used above 300 GHz?

No. Even the best organic PCB laminates produce unacceptable dielectric loss above 200-300 GHz, and their dimensional tolerances represent a significant fraction of a wavelength.

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